JPH01125545U - - Google Patents
Info
- Publication number
- JPH01125545U JPH01125545U JP2097088U JP2097088U JPH01125545U JP H01125545 U JPH01125545 U JP H01125545U JP 2097088 U JP2097088 U JP 2097088U JP 2097088 U JP2097088 U JP 2097088U JP H01125545 U JPH01125545 U JP H01125545U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- probe
- probe position
- inspected
- transferred
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 12
- 238000005259 measurement Methods 0.000 claims 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2097088U JPH01125545U (en]) | 1988-02-19 | 1988-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2097088U JPH01125545U (en]) | 1988-02-19 | 1988-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01125545U true JPH01125545U (en]) | 1989-08-28 |
Family
ID=31237790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2097088U Pending JPH01125545U (en]) | 1988-02-19 | 1988-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01125545U (en]) |
-
1988
- 1988-02-19 JP JP2097088U patent/JPH01125545U/ja active Pending